logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9373165 B1

PDFFull Text
Date of Patent:
Jun. 21, 2016

Filed:

Oct. 22, 2014

Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Amir Azordegan, Santa Clara, CA (US);

Pradeep Vukkadala, Fremont, CA (US);

Craig MacNaughton, Los Gatos, CA (US);

Jaydeep Sinha, Livermore, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:

Suiter Swantz pc llo

Primary Examiner:

Vuthe Siek

Int. Cl.
CPC ...
G06F 17/50 (2006.01); G06T 7/00 (2006.01); G01B 11/24 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0006 (2013.01); G01B 11/24 (2013.01); G01N 21/9501 (2013.01); G06F 17/5081 (2013.01); G06T 2207/30148 (2013.01);
Abstract

Methods and systems enabling ultra-high resolution topography measurements of patterned wafers are disclosed. Measurements obtained utilizing the ultra-high resolution metrology may be utilized to improve wafer metrology measurement accuracies. Additionally, measurements obtained utilizing the ultra-high resolution metrology may also be utilized to provide feedback and/or calibration control to improve fabrication and design of wafers.

Find Patent Forward Citations

Azordegan, Amir. (2016). Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance (U.S. Patent No. 9373165). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9373165

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…