The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2016

Filed:

Nov. 06, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Gerd Zschätzsch, Dresden, DE;

Stefan Flachowsky, Dresden, DE;

Dominic Thurmer, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 27/092 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1211 (2013.01); H01L 27/0924 (2013.01); H01L 29/0847 (2013.01); H01L 29/785 (2013.01); H01L 29/7834 (2013.01);
Abstract

A semiconductor device includes a semiconductor material positioned above a substrate and a gate structure positioned above a surface of the semiconductor material, the gate structure covering a non-planar surface portion of the surface. A sidewall spacer is positioned adjacent to the gate structure and includes first dopants having one of an N-type and a P-type conductivity, wherein the sidewall spacer covers an entire sidewall surface of the gate structure and partially covers the surface of the semiconductor material. Source/drain extension regions that include the first dopants are positioned within the non-planar surface portion and in alignment with the sidewall spacer, wherein a concentration of the first dopants within a portion of the sidewall spacer proximate the non-planar surface portion substantially corresponds to a concentration of the first dopants within the source/drain extension regions proximate the non-planar surface portion.


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