The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2016

Filed:

Jan. 07, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Kangguo Cheng, Schenectady, NY (US);

Shom S. Ponoth, Los Angeles, CA (US);

Raghavasimhan Sreenivasan, Schenectady, NY (US);

Theodorus E. Standaert, Clifton Park, NY (US);

Tenko Yamashita, Schenectady, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 29/161 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02532 (2013.01); H01L 29/161 (2013.01); H01L 29/66553 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01);
Abstract

The present invention relates generally to semiconductor devices, and more particularly, to a structure and method of reducing external resistance within fin field effect transistor (finFET) devices. A first spacer and a second spacer may be formed adjacent to a gate which may reduce capacitance in a substantial portion of a epitaxial source-drain region while also permitting a portion of the epitaxial source-drain region to be located close to a channel. By reducing capacitance from the gate on the substantial portion of the epitaxial source-drain region, resistance in the epitaxial source-drain region may be reduced which may result in increased device performance.


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