The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Aug. 06, 2013
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Hi Kuk Lee, Yongin-si, KR;
Sang Don Jang, Suwon-si, KR;
Jae Hyuk Chang, Seongnam-si, KR;
Hyang-Shik Kong, Seongnam-si, KR;
Cha-Dong Kim, Seoul, KR;
Chang Hoon Kim, Asan-si, KR;
Jung-In Park, Seoul, KR;
Sang Hyun Yun, Suwon-si, KR;
SAMSUNG DISPLAY CO., LTD., , KR;
Abstract
A stage transferring device invention includes: a transferring stage upon which an object is mounted and which transfers the object in an x-y plane; and a stage position measuring device. The stage position measuring device includes a one-dimensional scale on the transferring stage; a one-dimensional scale reading head which is configured to overlap the one-dimensional scale, irradiate a measuring beam to the overlapped one-dimensional scale and measure a 1D y-axis coordinate of the transferring stage; a two-dimensional encoder on the transferring stage; and a two-dimensional encoder reading head which is configured to overlap the two-dimensional encoder, irradiate a measuring beam to the overlapped two-dimensional encoder and measure a 2D x-axis coordinate and a 2D y-axis coordinate of the transferring stage.