The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Mar. 26, 2014
Ebara Corporation, Toyko, JP;
Kohtaro Kawamura, Tokyo, JP;
Toyoji Shinohara, Tokyo, JP;
Tetsuro Sugiura, Tokyo, JP;
Hideo Arai, Tokyo, JP;
Takashi Kyotani, Tokyo, JP;
Toshiharu Nakazawa, Tokyo, JP;
Keiichi Ishikawa, Tokyo, JP;
Seiji Kashiwagi, Tokyo, JP;
Yasuhiko Suzuki, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.