The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2016

Filed:

Apr. 22, 2015
Applicant:

Ulvac, Inc., Chigasaki-shi, JP;

Inventors:

Satoru Takasawa, Chigasaki, JP;

Shuhei Ichikawa, Chigasaki, JP;

Isao Sugiura, Chigasaki, JP;

Satoru Ishibashi, Chigasaki, JP;

Junichi Nitta, Chigasaki, JP;

Assignee:

ULVAC, INC., Chigasaki-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05K 3/16 (2006.01); H05K 1/11 (2006.01); H05K 3/18 (2006.01); H05K 1/03 (2006.01); C23F 1/02 (2006.01); H05K 3/06 (2006.01); C23C 14/20 (2006.01); C23C 14/34 (2006.01); C22C 9/06 (2006.01); H05K 3/38 (2006.01); H05K 3/46 (2006.01); H05K 3/10 (2006.01);
U.S. Cl.
CPC ...
H05K 3/16 (2013.01); C22C 9/06 (2013.01); C23C 14/205 (2013.01); C23C 14/3414 (2013.01); C23F 1/02 (2013.01); H05K 1/0366 (2013.01); H05K 1/115 (2013.01); H05K 3/06 (2013.01); H05K 3/188 (2013.01); H05K 3/388 (2013.01); H05K 3/4644 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/16227 (2013.01); H01L 2924/15311 (2013.01); H05K 3/108 (2013.01); H05K 2201/0209 (2013.01); H05K 2201/0317 (2013.01); H05K 2201/09509 (2013.01); H05K 2201/09563 (2013.01);
Abstract

A mounting device in which a conductive film that is not separated is formed on a resin substrate. Alloy thin films, which contain more than 50% by atom of Cu, 5% by atom or more and 30% by atom or less of Ni, and 3% by atom or more and 10% by atom or less of Al, are formed on a base consisting of a resin so as to be brought into contact with a surface of the base by sputtering. Conductive films consisting of copper are formed on surfaces of the alloy thin films so as to obtain a wiring film having a two-layer structure and a metal plug filled in a connection hole. The alloy thin films have high adhesion to a resin; and hence, the wiring film and the metal plug are not separated.


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