The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Nov. 21, 2012
Applicants:
Yoo-jeong Choi, Uiwang-si, KR;
Hyo-young Kwon, Uiwang-si, KR;
Youn-jin Cho, Uiwang-si, KR;
Yun-jun Kim, Uiwang-si, KR;
Young-min Kim, Uiwang-si, KR;
Yong-woon Yoon, Uiwang-si, KR;
Chung-heon Lee, Uiwang-si, KR;
Inventors:
Yoo-Jeong Choi, Uiwang-si, KR;
Hyo-Young Kwon, Uiwang-si, KR;
Youn-Jin Cho, Uiwang-si, KR;
Yun-Jun Kim, Uiwang-si, KR;
Young-Min Kim, Uiwang-si, KR;
Yong-Woon Yoon, Uiwang-si, KR;
Chung-Heon Lee, Uiwang-si, KR;
Assignee:
CHEIL INDUSTRIES, INC., Gumi-si, Gyeongsangbuk-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07C 39/14 (2006.01); C07C 39/12 (2006.01); G03F 7/11 (2006.01); G03F 7/09 (2006.01); G03F 7/004 (2006.01); G03F 7/075 (2006.01); G03F 7/30 (2006.01); G03F 7/36 (2006.01); B05D 1/00 (2006.01); B05D 3/00 (2006.01); B05D 3/02 (2006.01); B05D 3/06 (2006.01); C09D 173/00 (2006.01);
U.S. Cl.
CPC ...
C07C 39/14 (2013.01); B05D 1/005 (2013.01); B05D 3/007 (2013.01); B05D 3/0254 (2013.01); B05D 3/06 (2013.01); C07C 39/12 (2013.01); C09D 173/00 (2013.01); G03F 7/004 (2013.01); G03F 7/0752 (2013.01); G03F 7/094 (2013.01); G03F 7/11 (2013.01); G03F 7/30 (2013.01); G03F 7/36 (2013.01); C07C 2103/50 (2013.01); C07C 2103/54 (2013.01);
Abstract
Disclosed are a monomer for a hardmask composition represented by the Chemical Formula 1, a hardmask composition including the monomer, and a method of forming a pattern.