The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Jun. 15, 2010
Joseph H. Lyons, Wilton, CT (US);
Joseph H. Lyons, Wilton, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A fluid proximity sensor for surface measurements having a measurement chamber () with a measurement nozzle (), a reference chamber () with a reference nozzle (), and a diaphragm () forming an interface between the reference chamber and the measurement chamber. A shroud () that encloses the measurement nozzle and reference nozzle provides a peripheral gap () between the shroud and a work surface () being measured. By connecting either a partial vacuum supply or a partial fluid supply to the shroud, the internal shroud pressure can be raised or lowered and thus the gain-frequency operating regime of the proximity sensor optimized. Movement of the diaphragm in response to differential pressure changes can be sensed by optical, capacitive or inductive means ().