The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
May. 29, 2015
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Inventors:
Chun-Hsing Su, New Taipei, TW;
Jing-Cheng Lin, Hsin-Chu, TW;
Tsei-Chung Fu, Toufen Township, TW;
Wen-Hua Chang, Hsin-Chu, TW;
Yi-Chao Mao, Zhongli, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/16 (2012.01); B24B 7/22 (2006.01); B24B 37/013 (2012.01); B24B 49/12 (2006.01); H01L 21/67 (2006.01); B24B 49/10 (2006.01); H01L 21/66 (2006.01); H01L 23/00 (2006.01); H01L 21/683 (2006.01); H01L 23/31 (2006.01); H01L 23/538 (2006.01);
U.S. Cl.
CPC ...
B24B 37/16 (2013.01); B24B 7/228 (2013.01); B24B 37/013 (2013.01); B24B 49/10 (2013.01); B24B 49/12 (2013.01); H01L 21/67253 (2013.01); H01L 21/6835 (2013.01); H01L 22/12 (2013.01); H01L 22/26 (2013.01); H01L 24/19 (2013.01); H01L 24/20 (2013.01); H01L 24/97 (2013.01); H01L 21/6836 (2013.01); H01L 23/3114 (2013.01); H01L 23/5389 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68377 (2013.01); H01L 2221/68381 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/12105 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/73267 (2013.01); H01L 2224/97 (2013.01); H01L 2924/12042 (2013.01); H01L 2924/1431 (2013.01);
Abstract
A grinding wheel includes a base disk, and a plurality of teeth protruding beyond a surface of the base disk. The plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel.