The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2016

Filed:

Aug. 31, 2015
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Ming-Fa Chen, Taichung, TW;

Yu-Young Wang, New Taipei, TW;

Sen-Bor Jan, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 21/28 (2006.01); H01L 23/48 (2006.01); H01L 21/283 (2006.01); H01L 21/768 (2006.01); H01L 29/78 (2006.01); H01L 21/306 (2006.01); H01L 21/311 (2006.01); H01L 23/535 (2006.01); H01L 29/06 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 23/481 (2013.01); H01L 21/283 (2013.01); H01L 21/30604 (2013.01); H01L 21/31111 (2013.01); H01L 21/76829 (2013.01); H01L 21/76879 (2013.01); H01L 21/76895 (2013.01); H01L 21/76898 (2013.01); H01L 23/535 (2013.01); H01L 29/0649 (2013.01); H01L 29/41758 (2013.01); H01L 29/66636 (2013.01); H01L 29/7843 (2013.01); H01L 29/7848 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Methods and devices for connecting a through via and a terminal of a transistor formed of a strained silicon material are provided. The terminal, which can be a source or a drain of a NMOS or a PMOS transistor, is formed within a substrate. A first contact within a first inter-layer dielectric (ILD) layer over the substrate is formed over and connected to the terminal. A through via extends through the first ILD layer into the substrate. A second contact is formed over and connected to the first contact and the through via within a second ILD layer and a contact etch stop layer (CESL). The second ILD layer is over the CESL, and the CESL is over the first ILD layer, which are all below a first inter-metal dielectric (IMD) layer and the first metal layer of the transistor.


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