The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2016
Filed:
Apr. 25, 2012
Jan Bex, Overpelt, BE;
Nicolaas Ten Kate, Almkerk, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Johannes Wilhelmus Damen, Budel, NL;
Eugene Maria Brinkhof, Weert, NL;
Yogesh Pramod Karade, Eindhoven, NL;
Jan Bex, Overpelt, BE;
Nicolaas Ten Kate, Almkerk, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Johannes Wilhelmus Damen, Budel, NL;
Eugene Maria Brinkhof, Weert, NL;
Yogesh Pramod Karade, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method of manufacturing a substrate holder for use in a lithographic apparatus, the method including providing a main body having a surface and a plurality of burls projecting from the surface and having end surfaces to support a substrate, providing a carrier surface adjacent the main body surface, and forming a conductive layer on at least part of the main body surface and an integral part on at least part of the carrier surface.