The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2016

Filed:

Mar. 31, 2015
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Enrique Agorio, Portland, OR (US);

James Edgar Hudson, Portland, OR (US);

Gerhard Daniel, Portland, OR (US);

Michael Tanguay, York, ME (US);

Jason Arjavac, Portland, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); G01N 1/28 (2006.01); G01N 1/32 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01); H01J 37/31 (2006.01); H01J 37/285 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); G01N 1/286 (2013.01); G01N 1/32 (2013.01); H01J 37/26 (2013.01); H01J 37/28 (2013.01); H01J 37/285 (2013.01); H01J 37/31 (2013.01); G01N 2001/2873 (2013.01); G01N 2001/2886 (2013.01); G01R 31/2893 (2013.01); H01J 2237/202 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2812 (2013.01); H01J 2237/3109 (2013.01); H01J 2237/3114 (2013.01); H01J 2237/31745 (2013.01);
Abstract

An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.


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