logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9349564 B1

PDFFull Text
Date of Patent:
May. 24, 2016

Filed:

Jul. 17, 2014

Charged-particle lens that transmits emissions from sample

Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

N. William Parker, Hillsboro, OR (US);

Marcus Straw, Portland, OR (US);

Jorge Filevich, Portland, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:

Scheinberg & Associates

Michael O. Scheinberg

Primary Examiner:

Jack Berman

Int. Cl.
CPC ...
H01J 37/12 (2006.01); H01J 37/26 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/12 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 37/261 (2013.01); H01J 2237/12 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/24415 (2013.01); H01J 2237/2602 (2013.01);
Abstract

A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.

Find Patent Forward Citations

Parker, N.. (2016). Charged-particle lens that transmits emissions from sample (U.S. Patent No. 9349564). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9349564

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…