The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Jul. 30, 2012
Eiichi Shinohara, Yamanashi, JP;
Ken Taoka, Yamanashi, JP;
Eiichi Shinohara, Yamanashi, JP;
Ken Taoka, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A probe apparatushas a movable mounting tablethat mounts a wafer W on which multiple power devices are formed; a probe cardthat is provided above the mounting tableand has multiple probesA; a conductive film electrodeformed on a mounting surface of the mounting tableand an outer peripheral surface thereof; and a measurement linethat electrically connects the conductive film electrodeto a tester. Further, the probe apparatus measures electrical characteristics of the power devices on the mounting tableat a wafer level. Furthermore, the measurement lineincludes a switch deviceconfigured to open and close an electric path of the measurement linebetween the conductive film electrodeand the tester