The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2016

Filed:

May. 24, 2013
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Gerben Doornbos, Leuven, BE;

Krishna Kumar Bhuwalka, Leuven, BE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/82 (2006.01); H01L 21/00 (2006.01); H01L 27/092 (2006.01); H01L 21/336 (2006.01); H01L 21/8234 (2006.01); H01L 21/8238 (2006.01); H01L 27/06 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823821 (2013.01); H01L 21/823412 (2013.01); H01L 27/0605 (2013.01); H01L 27/0924 (2013.01); H01L 29/1054 (2013.01);
Abstract

A multi-threshold voltage (V) field-effect transistor (FET) formed through strain engineering is provided. An embodiment integrated circuit device includes a first transistor including a first channel region over a first buffer, the first channel region formed from a III-V semiconductor material and a second transistor including a second channel region over a second buffer, the second channel region formed from the III-V semiconductor material, the second buffer and the first buffer having a lattice mismatch. A first strain introduced by a lattice mismatch between the III-V semiconductor material and the first buffer is different than a second strain introduced by a lattice mismatch between the III-V semiconductor material and the second buffer. Therefore, the threshold voltage of the first transistor is different than the threshold voltage of the second transistor.


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