The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2016

Filed:

Sep. 10, 2012
Applicants:

John W. Andberg, Santa Cruz, CA (US);

Ira H. Leventhal, San Jose, CA (US);

Matthew W. Losey, Livermore, CA (US);

Yohannes Desta, Arcadia, CA (US);

Lakshmikanth Namburi, Arcadia, CA (US);

Vincent E. Lopopolo, San Jose, CA (US);

Sanjeev Grover, Campbell, CA (US);

Erik Volkerink, Palo Alto, CA (US);

Inventors:

John W. Andberg, Santa Cruz, CA (US);

Ira H. Leventhal, San Jose, CA (US);

Matthew W. Losey, Livermore, CA (US);

Yohannes Desta, Arcadia, CA (US);

Lakshmikanth Namburi, Arcadia, CA (US);

Vincent E. Lopopolo, San Jose, CA (US);

Sanjeev Grover, Campbell, CA (US);

Erik Volkerink, Palo Alto, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01R 1/04 (2006.01); G01R 1/073 (2006.01); G01R 35/00 (2006.01);
U.S. Cl.
CPC ...
G01R 1/073 (2013.01); G01R 1/0408 (2013.01); G01R 31/2891 (2013.01); G01R 31/2893 (2013.01); G01R 35/005 (2013.01);
Abstract

Disclosed herein is a cost effective, efficient, massively parallel multi-wafer test cell. Additionally, this test cell can be used for both single-touchdown and multiple-touchdown applications. The invention uses a novel 'split-cartridge' design, combined with a method for aligning wafers when they are separated from the probe card assembly, to create a cost effective, efficient multi-wafer test cell. A 'probe-card stops' design may be used within the cartridge to simplify the overall cartridge design and operation.


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