The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2016

Filed:

Feb. 06, 2014
Applicant:

Dynaloy, Llc, Kingsport, TN (US);

Inventors:

Michael Tod Phenis, Markleville, IN (US);

Lauri Johnson, Greenfield, IN (US);

Raymond Chan, Westborough, MA (US);

Diane Marie Scheele, Greenwood, IN (US);

Kimberly Dona Pollard, Anderson, IN (US);

Assignee:

Dynaloy, LLC, Kingsport, TN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/426 (2013.01); C11D 7/3209 (2013.01); C11D 7/3218 (2013.01); C11D 7/5009 (2013.01); C11D 11/0047 (2013.01); G03F 7/425 (2013.01);
Abstract

The disclosure is directed solutions and processes to remove substances from substrates. The substances can include photoresist. The solutions can include dimethylsulfoxide, a quaternary ammonium hydroxide, an alkanolamine, and less than 3% by weight water of a total weight of the solution. The quaternary ammonium hydroxide can include tetramethylammonium hydroxide, dimethyldipropylammonium hydroxide, or methyltriethylammonium hydroxide. Additionally, the solutions can include a secondary solvent. For example, the secondary solvent can include an alcohol. In another example, the secondary solvent can include ethylene glycol. Methods for the preparation and use of the solution to remove substances from substrates are also described.


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