The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Feb. 14, 2011
Sven Hansen, Garching, DE;
Matthias Conradi, Garching, DE;
Georg Fink, Munich, DE;
SUSS MICROTEC LITHOGRAPHY GMBH, Garching, DE;
Abstract
The invention relates to a method and device for expanding the travel or control displacement of linear actuators that is available during an imprinting or embossing stroke. The wedge error compensating head () comprises a movable part (), a stationary part () and at least three linear actuators (). Each linear actuator () is connected to one of the parts () at one end and to the other of the two parts () by wedges () at the other end. By means of the wedges (), it is possible to coarsely or roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators () are only used for fine or precision compensation for the wedge error. In this way, sufficient control displacement is available for the imprinting stroke with the linear actuators.