The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
Apr. 03, 2012
Koji Yoshii, Oshu, JP;
Tatsuya Yamaguchi, Sapporo, JP;
Wenling Wang, Oshu, JP;
Takanori Saito, Oshu, JP;
Koji Yoshii, Oshu, JP;
Tatsuya Yamaguchi, Sapporo, JP;
Wenling Wang, Oshu, JP;
Takanori Saito, Oshu, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A heat treatment apparatus including: a processing container for processing wafers held in a boat; heaters for heating the processing container; and a control section for controlling the heaters. Heater temperature sensors are provided between the heaters and the processing container, in-container temperature sensors are provided in the processing container, and movable temperature sensors are provided in the boat. The temperature sensors are connected to a temperature estimation section. The temperature estimation section selects two of the three types of temperature sensors, e.g. the movable temperature sensors and the in-container temperature sensors, and determines the temperature of a wafer according to the following formula: T=T×(1−α)+T×α, α>1, where Tand Trepresent detection temperatures of the selected temperature sensors, and α represents a mixing ratio.