The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
Nov. 07, 2014
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Inventors:
Wen-Hao Cheng, Hsin-Chu, TW;
Chih-Chiang Tu, Tauyen, TW;
Chung-Min Fu, Chungli, TW;
Ajay Nandoriya, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); G06T 15/10 (2011.01); G01N 23/203 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
G06T 15/10 (2013.01); G01N 23/203 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); G06T 2215/16 (2013.01); H01J 2237/24578 (2013.01); H01J 2237/2611 (2013.01); H01J 2237/2815 (2013.01); H01J 2237/2818 (2013.01);
Abstract
A system comprises an electron beam directed toward a three-dimensional object with one tilting angle and at least two azimuth angles, a detector configured to receive a plurality of scanning electron microscope (SEM) images from the three-dimensional object and a processor configured to calculate a height and a sidewall edge of the three-dimensional object.