The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
Aug. 14, 2014
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventor:
Makiko Irie, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD, Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/40 (2006.01); G03F 7/039 (2006.01); G03F 7/30 (2006.01); G03F 7/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); G03F 7/027 (2013.01); G03F 7/30 (2013.01);
Abstract
A chemically amplified positive-type photosensitive resin composition including a compound represented by the following formula (1), having a melting point of 40° C. or lower at 1 atm, a resin whose solubility in alkali increases under the action of an acid, and a photoacid generator. In the formula, Rrepresents a hydrogen atom or an organic group; and R, R, and Rindependently represent a monovalent hydrocarbon group which may have a substituent, and at least two of R, R, and Rmay be bonded to each other to form a cyclic structure.