The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Sep. 04, 2014
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Makoto Kiyama, Itami, JP;
Keiji Ishibashi, Itami, JP;
Akihiro Hachigo, Itami, JP;
Naoki Matsumoto, Itami, JP;
Fumitake Nakanishi, Itami, JP;
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Abstract
A group III nitride composite substrate with a diameter of 75 mm or more includes a support substrate having a thickness tof 0.1 mm or more and 1 mm or less and a group III nitride film having a thickness t, thinner than the thickness t, of 0.01 mm or more and 0.25 mm or less that are bonded to each other. An absolute value |Δα| of a difference Δα in thermal expansion coefficient determined by subtracting a thermal expansion coefficient αof the support substrate from a thermal expansion coefficient αof the group III nitride film is 2.2×10Kor less. A Young's modulus Eand the thickness tof the support substrate, a Young's modulus Eand the thickness tof the group III nitride film, and the difference Δα in thermal expansion coefficient satisfy a relation: t/t≧6E·|Δα|/E.