The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Mar. 19, 2012
Applicant:
Masataka Hatta, Nirasaki, JP;
Inventor:
Masataka Hatta, Nirasaki, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 23/00 (2006.01); G05D 23/19 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05D 23/1919 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01);
Abstract
A cooling device operating method and corresponding cooling device used in an inspection apparatus. The method controls a cooling device which in turn cools a wafer chuck on which a semiconductor wafer is loaded. The temperature of the wafer chuck is controllable using the cooling device and a heating device. Low temperature and high temperature inspections of the wafer are performed under control of the controller. The cooling device is continuously run via the controller for the low temperature inspection, but it is stopped at least one time at the start of the high temperature inspection via the controller.