The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
May. 15, 2012
Akiko Kiyotomi, Koshi, JP;
Akiko Kiyotomi, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A treatment solution supply apparatus that supplies a treatment solution from a treatment solution supply source via a treatment solution supply pipe to a supply nozzle, includes: electrodes that are provided at the treatment solution supply pipe and apply a DC voltage to the treatment solution in the treatment solution supply pipe; a power unit that applies the DC voltage to the electrodes while freely reversing a polarity of the DC voltage; a cleaning solution supply pipe connected to the treatment solution supply pipe and configured to supply a cleaning solution from a cleaning solution supply source to the treatment solution supply pipe; and a waste solution pipe that drains the cleaning solution passed through a position of the treatment solution supply pipe where the electrodes are provided.