The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Jun. 15, 2009
Denis Alexandrovich Glushkov, Witten, DE;
Vadim Yevgenyevich Banine, Helmond, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Konstantin Nikolaevich Koshelev, Troitsk, RU;
Givi Georgievich Zukakishvili, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Yurii Victorovitch Sidelnikov, Troitsk, RU;
Kurt Gielissen, Eindhoven, NL;
Oleg Yakushev, Korolev, RU;
Denis Alexandrovich Glushkov, Witten, DE;
Vadim Yevgenyevich Banine, Helmond, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Konstantin Nikolaevich Koshelev, Troitsk, RU;
Givi Georgievich Zukakishvili, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Yurii Victorovitch Sidelnikov, Troitsk, RU;
Kurt Gielissen, Eindhoven, NL;
Oleg Yakushev, Korolev, RU;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A discharge produced plasma radiation source includes a laser beam pulse generator configured to provide a laser beam pulse to trigger a pinch in a plasma of the discharge produced plasma radiation source. The laser beam pulse generator is arranged to provide a laser beam pulse having an energy greater than an optimum laser beam pulse energy that corresponds to a maximum output of a given wavelength of radiation for a given discharge energy.