IDiyas

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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9304393 B1

PDFFull Text
Date of Patent:
Apr. 05, 2016

Filed:

Jun. 27, 2013

Radiation-sensitive resin composition and compound

Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Kazuo Nakahara, Tokyo, JP;

Ken Maruyama, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Anca Eoff

Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/06 (2006.01); C07C 309/07 (2006.01); C07C 309/12 (2006.01); C07C 309/19 (2006.01); C07C 22/02 (2006.01); C07C 381/12 (2006.01); C07D 307/77 (2006.01); C08K 5/07 (2006.01); C07C 22/08 (2006.01); C07C 25/18 (2006.01); G03F 7/039 (2006.01); G03F 7/11 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/004 (2013.01); C07C 22/02 (2013.01); C07C 22/08 (2013.01); C07C 25/18 (2013.01); C07C 309/19 (2013.01); C07C 381/12 (2013.01); C07D 307/77 (2013.01); C08K 5/07 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); G03F 7/11 (2013.01); G03F 7/2041 (2013.01); C07C 2101/08 (2013.01); C07C 2101/14 (2013.01); C07C 2101/16 (2013.01); C07C 2102/42 (2013.01);
Abstract

A radiation-sensitive resin composition includes a compound represented by a formula (1), and a polymer that includes a structural unit having an acid-labile group. Rand Reach independently represent a hydrogen atom, or the like. Rand Reach independently represent a hydrogen atom or the like. Xand Xeach independently represent a hydrogen atom, or the like, or Xand Xtaken together represent —S—, —O—, —SO—, or the like. A represents an ethanediyl group, wherein at least one hydrogen atom included in X, Xand A is substituted by —Y—SOM. Y represents an alkanediyl group having 1 to 10 carbon atoms, or the like. Mrepresents a monovalent onium cation. In the case where —Y—SOMis present in a plurality of number, a plurality of Ys are each identical or different and a plurality of Ms are each identical or different.

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