The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Apr. 26, 2012
Masahiro Uekita, Kanagawa-ken, JP;
Hiroshi Koizumi, Kanagawa-ken, JP;
Tomomichi Naka, Kanagawa-ken, JP;
Naoaki Sakurai, Kanagawa-ken, JP;
Eijiro Koike, Kanagawa-ken, JP;
Masahiro Uekita, Kanagawa-ken, JP;
Hiroshi Koizumi, Kanagawa-ken, JP;
Tomomichi Naka, Kanagawa-ken, JP;
Naoaki Sakurai, Kanagawa-ken, JP;
Eijiro Koike, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, a substrate processing system includes a measuring unit, a data processing unit, and a processing unit. The measuring unit is configured to measure information relating to a thickness dimension of a substrate. The substrate includes a light emitting unit and a wavelength conversion unit. The wavelength conversion unit includes a phosphor. The data processing unit is configured to determine processing information relating to a thickness direction of the wavelength conversion unit based on the measured information relating to the thickness dimension of the substrate and based on information relating to a characteristic of light emitted from the light emitting unit. The processing unit is configured to perform processing of the wavelength conversion unit based on the determined processing information.