The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Jul. 17, 2013
Applied Materials Israel, Ltd., Rehovot, IL;
Igor Krayvitz (Krivts), Rehovot, IL;
Israel Avneri, Ramat Gan, IL;
Yoram Uziel, Post Misgav, IL;
Natan Schlimoff, Rehovot, IL;
Gilad Schwartz, Meishar, IL;
Yochanan Madmon, Kiryan Epron, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.