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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9299617 B1

PDFFull Text
Date of Patent:
Mar. 29, 2016

Filed:

Jan. 28, 2015

Locally isolated protected bulk finfet semiconductor device

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Kangguo Cheng, Schenectady, NY (US);

Raghavasimhan Sreenivasan, Schenectady, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:

Cantor Colburn LLP

Primary Examiner:

Thao P Le

Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 29/16 (2006.01); H01L 29/78 (2006.01); H01L 21/76 (2006.01); H01L 21/02 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823481 (2013.01); H01L 21/02164 (2013.01); H01L 21/02181 (2013.01); H01L 21/76 (2013.01); H01L 21/76224 (2013.01); H01L 21/823431 (2013.01); H01L 29/16 (2013.01); H01L 29/785 (2013.01); H01L 29/7851 (2013.01);
Abstract

A semiconductor device includes a bulk substrate having a plurality of trenches formed therein. The trenches define a plurality of semiconductor fins that are integral with the bulk semiconductor substrate. A local dielectric material is disposed in each trench and between each pair of semiconductor fins among the plurality of semiconductor fins. The semiconductor device further includes an etch resistant layer formed on the local dielectric material.

Find Patent Forward Citations

Cheng, Kangguo. (2016). Locally isolated protected bulk finfet semiconductor device (U.S. Patent No. 9299617). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9299617

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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