The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2016
Filed:
Jan. 22, 2013
Hitachi Cable, Ltd., Tokyo, JP;
Kazufumi Suenaga, Tsuchiura, JP;
Kenji Shibata, Tsukuba, JP;
Kazutoshi Watanabe, Tsuchiura, JP;
Akira Nomoto, Kasumigaura, JP;
Fumimasa Horikiri, Nagareyama, JP;
SCIOCS COMPANY LIMITED, Hitachi-Shi, Ibaraki-Ken, JP;
Abstract
A piezoelectric element includes a substrate, and at least a lower electrode layer, a piezoelectric film represented by a general formula of (NaKLi)NbO(0≦x≦1, 0≦y≦1, 0≦z≦0.2, x+y+z=1); and an upper electrode layer successively formed on the substrate. The piezoelectric film has a crystal structure of pseudo-cubic crystal, tetragonal crystal, orthorhombic crystal, monoclinic crystal or rhombohedral crystal, or has a state that at least two of the crystal structures coexist. The piezoelectric film is preferentially oriented to certain specific axes that are not more than two axes of crystal axes in the crystal structures. At least one of domain crystal component of a c-axis orientation domain crystal component and an a-axis orientation domain crystal component exists as the components of the crystal axes oriented.