The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2016

Filed:

Feb. 05, 2013
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Ting-Ying Chen, Hsinchu, TW;

Yi Hsun Chiu, Zhubei, TW;

Ching-Hou Su, Hsin-Chu, TW;

Chyi-Tsong Ni, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); H01L 23/10 (2006.01); H01L 21/50 (2006.01); H01L 23/00 (2006.01); B81C 1/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 23/10 (2013.01); B81C 1/00269 (2013.01); H01L 21/50 (2013.01); H01L 24/29 (2013.01); H01L 24/83 (2013.01); H01L 24/94 (2013.01); B81C 2203/019 (2013.01); B81C 2203/0118 (2013.01); H01L 22/32 (2013.01); H01L 24/32 (2013.01); H01L 2224/291 (2013.01); H01L 2224/2908 (2013.01); H01L 2224/29011 (2013.01); H01L 2224/29082 (2013.01); H01L 2224/29109 (2013.01); H01L 2224/29111 (2013.01); H01L 2224/29124 (2013.01); H01L 2224/29144 (2013.01); H01L 2224/29147 (2013.01); H01L 2224/32148 (2013.01); H01L 2224/32238 (2013.01); H01L 2224/32268 (2013.01); H01L 2224/83123 (2013.01); H01L 2224/83127 (2013.01); H01L 2224/83191 (2013.01); H01L 2224/83193 (2013.01); H01L 2224/83204 (2013.01); H01L 2224/83805 (2013.01); H01L 2924/01322 (2013.01); H01L 2924/1461 (2013.01); H01L 2924/15787 (2013.01);
Abstract

A wafer seal ring may be formed on a first and/or a second wafer. One or both of the first and/or second wafers may have one or more dies formed thereon. The wafer seal ring may be formed to surround the dies of a corresponding wafer. One or more die seal rings may be formed around the one or more dies. The wafer seal ring may be formed to a height that may be approximately equal to a height of one or more die seal rings formed on the first and/or second wafer. The wafer seal ring may be formed to provide for eutectic or fusion bonding processes. The first and second wafers may be bonded together to form a seal ring structure between the first and second wafers. The seal ring structure may provide a hermetic seal between the first and second wafers.


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