The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Feb. 28, 2012
Andreas Klipp, Lambsheim, DE;
Vijay Immanuel Raman, Mannheim, DE;
Shyam Sundar Venkataraman, Zhongli, TW;
Raimund Mellies, Salzbergen, DE;
Mingjie Zhong, Potsdam, NY (US);
Andreas Klipp, Lambsheim, DE;
Vijay Immanuel Raman, Mannheim, DE;
Shyam Sundar Venkataraman, Zhongli, TW;
Raimund Mellies, Salzbergen, DE;
Mingjie Zhong, Potsdam, NY (US);
BASF SE, Ludwigshafen, DE;
Abstract
Aqueous, nitrogen-free cleaning composition, preparation and use thereof are provided. The composition having a pH of from 5 to 8 comprises (A) an amphiphilic nonionic, water-soluble or water-dispersible surfactant and (B) a metal chelating agent selected from polycarboxylic acids having at least 3 carboxylic acid groups. The composition is used for removing residues and contaminants from semiconductor substrates.