The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2016

Filed:

Dec. 26, 2013
Applicant:

Intermolecular Inc., San Jose, CA (US);

Inventor:

Yun Wang, San Jose, CA (US);

Assignees:

Intermolecular, Inc., San Jose, CA (US);

Kabushiki Kaisha Toshiba, Tokyo, JP;

SanDisk 3D LLC, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 47/00 (2006.01); H01L 45/00 (2006.01); H01L 27/24 (2006.01);
U.S. Cl.
CPC ...
H01L 45/146 (2013.01); H01L 45/08 (2013.01); H01L 45/12 (2013.01); H01L 45/1233 (2013.01); H01L 45/145 (2013.01); H01L 27/2409 (2013.01); H01L 27/2463 (2013.01); H01L 27/2481 (2013.01);
Abstract

Provided are resistive random access memory (ReRAM) cells and methods of fabricating thereof. The ReRAM cells may include a first layer operable as a bottom electrode and a second layer operable to switch between a first resistive state and a second resistive state. The ReRAM cells may include a third layer that includes a material having a lower breakdown voltage than the second layer and further includes a conductive path created by electrical breakdown. The third layer may include any of tantalum oxide, titanium oxide, and zirconium oxide. Moreover, the third layer may include a binary nitride or a ternary nitride. The binary nitrides may include any of tantalum, titanium, tungsten, and molybdenum. The ternary nitrides may include silicon or aluminum and any of tantalum, titanium, tungsten, and molybdenum. The ReRAM cells may further include a fourth layer operable as a top electrode.


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