The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Mar. 15, 2013
Globalfoundries Inc., Grand Cayman, KY;
Wagdi W. Abadeer, Jericho, VT (US);
Kiran V. Chatty, Oviedo, FL (US);
Jason E. Cummings, Albany, NY (US);
Toshiharu Furukawa, Essex Junction, VT (US);
Robert J. Gauthier, Hinesburg, VT (US);
Jed H. Rankin, Richmond, VT (US);
Robert R. Robison, Colchester, VT (US);
William R. Tonti, Essex Junction, VT (US);
GLOBALFOUNDRIES. INC., Grand Cayman, KY;
Abstract
Various aspects include extremely thin semiconductor-on-insulator (ETSOI) layers. In one embodiment, an ETSOI layer includes a plurality of shallow trench isolations (STI) defining a plurality of distinct semiconductor-on-insulator (SOI) regions, the distinct SOI regions having at least three different thicknesses; at least one recess located within the distinct SOI regions; and an oxide cap over the at least one recess.