The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2016

Filed:

Nov. 08, 2013
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Sonia Ghosh, Fishkill, NY (US);

Randy Mann, Milton, NY (US);

Norman Chen, Poughkeepsie, NY (US);

Shaowen Gao, Clifton Park, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 5/00 (2006.01); H01L 21/66 (2006.01); G06F 17/50 (2006.01); H01L 21/3213 (2006.01); H01L 27/02 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G06F 17/5068 (2013.01); H01L 21/32139 (2013.01); H01L 27/0207 (2013.01);
Abstract

Methods for forming a semiconductor layer, such as a metal1 layer, having minimum width features separated by a distance greater than a minimum pitch, and the resulting devices are disclosed. Embodiments may include determining a first shape and a second shape having a minimum width within a semiconductor layer, wherein a distance between the first shape and the second shape is greater than a minimum pitch, determining an intervening shape between the first shape and the second shape, and designating a dummy shape within the intervening shape, wherein the dummy shape is at the minimum pitch from the first shape.


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