The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Apr. 23, 2015
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Hyun-woo Kim, Chungju-si, KR;
Woo-seok Ko, Seoul, KR;
Young-hwan Kim, Seoul, KR;
Jeong-hoi Kim, Suwon-si, KR;
Baek-man Sung, Seoul, KR;
Hyung-su Son, Hwaseong-si, KR;
Chae-ho Shin, Hwaseong-si, KR;
Yu-sin Yang, Seoul, KR;
Jae-youn Wi, Suwon-si, KR;
Sang-kil Lee, Yongin-si, KR;
Chung-sam Jun, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do, KR;
Abstract
A conductive atomic force microscope including a plurality of probe structures each including a probe and a cantilever connected thereto, a power supplier applying a bias voltage, a current detector detecting a first current flowing between a sample object and each of the probes and a second current flowing between a measurement object and each of the probes, and calculating representative currents for the sample and measurement objects based on the first and second currents, respectively, and a controller calculating a ratio between representative currents of the sample object measured by each of the probe structures, calculating a scaling factor for scaling the representative current with respect to the measurement object measured by each of the probes, and determine a reproducible current measurement value based on the second measurement current and the scaling factor may be provided.