The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2016
Filed:
Apr. 18, 2011
Wojciech Grzegorczyk, Brussels, BE;
Kristiaan Van Rossen, Bierbeek, BE;
Johan DE Greeve, Brabant, BE;
Dominique Janssens, Antwerp, BE;
Wojciech Grzegorczyk, Brussels, BE;
Kristiaan Van Rossen, Bierbeek, BE;
Johan De Greeve, Brabant, BE;
Dominique Janssens, Antwerp, BE;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An apparatus for illuminating monocrystalline and polycrystalline substrates in order to image micro cracks, pinholes and inclusions in the substrates is disclosed. A first illumination system illuminates a first line of light on the front surface of the substrate. A second illumination system illuminates a second line of light on the front surface of the substrate. The first line of light and the second line of light are oriented transverse to the transport direction (T). The second illumination system is arranged within a 3-dimensional coordinate system such that the substrate is illuminated under a second angle. The arrangement of the second illumination system is comparable to a street lamp. A camera, preferably a camera, is arranged such that it faces the back surface of the substrate. The camera captures light which is transmitted through the substrate from the first illumination system and the second illumination system.