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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9245965 B1

PDFFull Text
Date of Patent:
Jan. 26, 2016

Filed:

Jul. 10, 2014

Uniform finfet gate height

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Balasubramanian S. Haran, Watervliet, NY (US);

Sanjay Mehta, Niskayuna, NY (US);

Shom Ponoth, Los Angeles, CA (US);

Ravikumar Ramachandran, Pleasantville, NY (US);

Stefan Schmitz, Ballston Spa, NY (US);

Theodorus E. Standaert, Clifton Park, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:

Heslin Rothenberg Farley & Mesiti P.C.

Primary Examiner:

Lex Malsawma

Assistant Examiner:

Long Le

Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 27/12 (2006.01); H01L 27/088 (2006.01); H01L 21/28 (2006.01); H01L 21/84 (2006.01); H01L 21/8234 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42364 (2013.01); H01L 21/28008 (2013.01); H01L 21/823431 (2013.01); H01L 21/845 (2013.01); H01L 27/0886 (2013.01); H01L 27/1211 (2013.01); H01L 29/66545 (2013.01);
Abstract

A structure including a first plurality of fins and a second plurality of fins etched from a semiconductor substrate, and a fill material located above the semiconductor substrate and between the first plurality of fins and the second plurality of fins, the fill material does not contact either the first plurality of fins or the second plurality of fins.

Find Patent Forward Citations

Haran, Balasubramanian. (2016). Uniform finfet gate height (U.S. Patent No. 9245965). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9245965

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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