The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Aug. 21, 2014
Applicant:
Macronix International Co., Ltd., Hsinchu, TW;
Inventor:
Kuang-Wen Liu, Hsinchu, TW;
Assignee:
MACRONIX International Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 27/115 (2006.01); H01L 29/792 (2006.01); H01L 29/423 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 21/762 (2006.01); H01L 21/28 (2006.01); H01L 21/311 (2006.01); H01L 29/51 (2006.01); H01L 29/49 (2006.01); H01L 21/768 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/28282 (2013.01); H01L 21/31116 (2013.01); H01L 21/762 (2013.01); H01L 21/768 (2013.01); H01L 23/528 (2013.01); H01L 27/11565 (2013.01); H01L 27/11568 (2013.01); H01L 29/0649 (2013.01); H01L 29/4234 (2013.01); H01L 29/4925 (2013.01); H01L 29/513 (2013.01); H01L 29/518 (2013.01); H01L 29/66833 (2013.01); H01L 29/7926 (2013.01);
Abstract
A memory device is provided, which includes a plurality of gate pillar structures and a plurality of dielectric pillars extending alternately arranged along a same direction and embedding in a stack layer so that the stack layer divided into a plurality of stack structures.