The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Jun. 30, 2014
Applicant:
Sandisk Technologies Inc., Plano, TX (US);
Inventors:
Eiichi Fujikura, Mie, JP;
Susumu Okazaki, Mie, JP;
Takuya Futase, Mie, JP;
Fumiaki Toyama, San Jose, CA (US);
Hiroaki Koketsu, Kanagawa, JP;
Assignee:
SanDisk Technologies Inc., Plano, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 27/115 (2006.01); H01L 21/28 (2006.01); H01L 21/3205 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11524 (2013.01); H01L 21/28061 (2013.01); H01L 21/28273 (2013.01); H01L 21/32055 (2013.01); H01L 21/32133 (2013.01); H01L 27/11529 (2013.01); H01L 27/11541 (2013.01);
Abstract
A NAND flash memory integrated circuit chip includes a cell area and a peripheral area with structures of different heights, with higher structures in the peripheral area to provide low resistance and lower structures in the memory array so that the risk of word line collapse is maintained at acceptable levels.