The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2016

Filed:

Jul. 12, 2013
Applicant:

Mpi Corporation, Chu-Pei, Hsinchu Shien, TW;

Inventors:

Chia-Tai Chang, Chu-Pei, TW;

Chin-Yi Tsai, Chu-Pei, TW;

Chiu-Kuei Chen, Chu-Pei, TW;

Chen-Chih Yu, Chu-Pei, TW;

Chien-Chang Lai, Chu-Pei, TW;

Chin-Tien Yang, Chu-Pei, TW;

Hui-Pin Yang, Chu-Pei, TW;

Keng-Shieng Chang, Chu-Pei, TW;

Yun-Ru Huang, Chu-Pei, TW;

Assignee:

MPI Corporation, Chu-Pei, Hsinchu Shien, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01R 1/04 (2006.01); G01R 1/06 (2006.01); H01L 21/68 (2006.01); G01R 1/073 (2006.01); G01R 1/067 (2006.01);
U.S. Cl.
CPC ...
G01N 21/88 (2013.01); G01R 1/073 (2013.01); G01R 1/07342 (2013.01); G01R 1/04 (2013.01); G01R 1/06711 (2013.01); H01L 21/68 (2013.01);
Abstract

A probe holding structure includes a substrate and a plurality of holding modules. The substrate has an opening and a plurality of grooves arranged around a periphery of the opening. The holding modules are connected with the grooves, respectively. Each holding modules includes a fixing member and a plurality of probes. The fixing member is connected with a corresponding groove. The probes are connected with the fixing member and pass through the corresponding groove. The probe holding structure is combined with a lens adjusting mechanism having a lens to form an optical inspection device for testing electric characteristics of chips.


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