The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2016
Filed:
Aug. 16, 2010
Kiyotaka Ishibashi, Hyogo, JP;
Osamu Morita, Hyogo, JP;
Kiyotaka Ishibashi, Hyogo, JP;
Osamu Morita, Hyogo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A microwave supply unitof a plasma processing apparatusincludes a stub memberconfigured to be extensible from the outer conductortoward the inner conductor. The stub memberserves as a distance varying device for varying a distance in the radial direction between a part of the outer surfaceof the inner conductorand a facing member facing the part of the outer surface of the inner conductorin the radial direction, i.e., the cooling plate protrusion. The stub memberincludes a rod-shaped membersupported at the outer conductorand configured to be extended in the radial direction; and a screwas a moving distance adjusting member for adjusting a moving distance of the rod-shaped memberin the radial direction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile