The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2016

Filed:

Aug. 08, 2012
Applicants:

Taichiroo Konno, Hitachi, JP;

Hajime Fujikura, Mito, JP;

Michiko Matsuda, Arakawa-ku, JP;

Inventors:

Taichiroo Konno, Hitachi, JP;

Hajime Fujikura, Mito, JP;

Michiko Matsuda, Arakawa-ku, JP;

Assignee:

SCIOCS COMPANY LIMITED, Hitachi-Shi, Ibaraki-Ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/08 (2006.01); H01L 21/02 (2006.01); C30B 25/14 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0262 (2013.01); C30B 25/08 (2013.01); C30B 25/14 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/02576 (2013.01); H01L 21/02581 (2013.01);
Abstract

A metal chloride gas generator includes: a tube reactor including a receiving section for receiving a metal on an upstream side, and a growing section in which a growth substrate is placed on a downstream side; a gas inlet pipe arranged to extend from an upstream end with a gas inlet via the receiving section to the growing section, for introducing a gas from the upstream end to supply the gas to the receiving section, and supplying a metal chloride gas produced by a reaction between the gas and the metal in the receiving section to the growing section; and a heat shield plate placed in the reactor to thermally shield the upstream end from the growing section. The gas inlet pipe is bent between the upstream end and the heat shield plate.


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