The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2016
Filed:
Nov. 21, 2014
Applicant:
Tel Epion Inc., Billerica, MA (US);
Inventor:
Matthew C. Gwinn, Winchendon, MA (US);
Assignee:
TEL Epion Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/31 (2006.01); H01J 49/04 (2006.01); H01J 37/30 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/30 (2013.01); H01J 37/08 (2013.01); H01J 2237/0812 (2013.01); H01J 2237/317 (2013.01);
Abstract
A method and system for performing gas cluster ion beam (GCIB) etch processing of various materials is described. In particular, the GCIB etch processing includes using one or more molecular beams to optimize pressure at localized regions of the ion beam.