The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2016
Filed:
Oct. 08, 2013
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Stephen P. Ayotte, Bristol, VT (US);
Alissa R. Cote, Winooski, VT (US);
Kendra A. Lyons, Burlington, VT (US);
John C. Malinowski, Jericho, VT (US);
Benjamin J. Pierce, Winooski, VT (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/311 (2006.01); H01L 21/3105 (2006.01); H01L 21/02 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 23/564 (2013.01); H01L 21/02118 (2013.01); H01L 21/3105 (2013.01); H01L 21/31111 (2013.01); H01L 23/562 (2013.01); H01L 23/3192 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A self-healing crack stop structure and methods of manufacture are disclosed herein. The structure comprises a crack stop structure formed in one or more dielectric layers and surrounding an active region of an integrated circuit chip. The crack stop comprises self healing material which, upon propagation of a crack, is structured to seal the crack and prevent further propagation of the crack.