The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2016
Filed:
Mar. 08, 2013
Applied Materials, Inc., Santa Clara, CA (US);
Jeffrey Drue David, San Jose, CA (US);
Boguslaw A. Swedek, Cupertino, CA (US);
Doyle E. Bennett, Santa Clara, CA (US);
Thomas H. Osterheld, Mountain View, CA (US);
Benjamin Cherian, San Jose, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Harry Q. Lee, Los Altos, CA (US);
Allen L. D'Ambra, Burlingame, CA (US);
Jagan Rangarajan, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing apparatus includes a plurality of stations supported on a platform, the plurality of stations including at least two polishing stations and a transfer station, each polishing station including a platen to support a polishing pad, a plurality of carrier heads suspended from and movable along a track such that each polishing station is selectively positionable at the stations, and a controller configured to control motion of the carrier heads along the track such that during polishing at each polishing station only a single carrier head is positioned in the polishing station.