The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 29, 2015

Filed:

May. 29, 2014
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Natsumi Yokokawa, Shizuoka, JP;

Takeshi Kawabata, Shizuoka, JP;

Hiroo Takizawa, Shizuoka, JP;

Hideaki Tsubaki, Shizuoka, JP;

Shuji Hirano, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/038 (2006.01); C09D 125/18 (2006.01); C08F 212/00 (2006.01); C08F 222/10 (2006.01); C08F 8/00 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0388 (2013.01); C08F 8/00 (2013.01); C08F 212/00 (2013.01); C08F 222/10 (2013.01); C09D 125/18 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/039 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01);
Abstract

There is provided an actinic ray-sensitive or radiation-sensitive composition comprising (P) a compound having a phenolic hydroxyl group and a group formed by substituting for the hydrogen atom in a phenolic hydroxyl group by a group represented by the specific formula, a resist film formed using the specific actinic ray-sensitive or radiation-sensitive composition, a pattern forming method containing steps of exposing and developing the resist film, a manufacturing method of an electronic device, containing the pattern forming method, and an electronic device manufactured by the specific manufacturing method of an electronic device.


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