The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Nov. 06, 2012
Takayuki Ito, Shizuoka, JP;
Hidenori Takahashi, Shizuoka, JP;
Tomotaka Tsuchimura, Shizuoka, JP;
Shohei Kataoka, Shizuoka, JP;
Takeshi Inasaki, Shizuoka, JP;
Takayuki Ito, Shizuoka, JP;
Hidenori Takahashi, Shizuoka, JP;
Tomotaka Tsuchimura, Shizuoka, JP;
Shohei Kataoka, Shizuoka, JP;
Takeshi Inasaki, Shizuoka, JP;
FUJITSU Corporation, Tokyo, JP;
Abstract
Provided is an actinic ray-sensitive or radiation-sensitive resin composition, a resist film formed with the composition, and a pattern-forming method using the same. The actinic ray-sensitive or radiation-sensitive resin composition includes (P) a resin that contains the following repeating units (A), (B) and (C); and a solvent having a boiling temperature of 150° C. or less,
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile