The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Sep. 09, 2014
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Masaki Ohashi, Joetsu, JP;
Masahiro Fukushima, Joetsu, JP;
Tomohiro Kobayashi, Joetsu, JP;
Ryosuke Taniguchi, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/38 (2006.01); C07C 69/753 (2006.01); C07C 69/635 (2006.01); G03F 7/20 (2006.01); C07C 381/12 (2006.01); C07C 69/63 (2006.01); C07C 69/757 (2006.01); C07C 59/115 (2006.01);
U.S. Cl.
CPC ...
C07C 69/753 (2013.01); C07C 59/115 (2013.01); C07C 69/63 (2013.01); C07C 69/635 (2013.01); C07C 69/757 (2013.01); C07C 381/12 (2013.01); G03F 7/004 (2013.01); G03F 7/2004 (2013.01); G03F 7/38 (2013.01); C07C 2101/14 (2013.01); C07C 2102/42 (2013.01); C07C 2103/54 (2013.01);
Abstract
A caboxylic acid sulfonium salt having formula (1) is provided wherein Ris hydrogen or a monovalent hydrocarbon group, Rand Rare hydrogen or a monovalent hydrocarbon group, at least one of R, Rand Rhas a cyclic structure, L is a single bond or forms an ester, sulfonate, carbonate or carbamate bond with the vicinal oxygen atom, R, Rand Rare monovalent hydrocarbon groups. The sulfonium salt functions as a quencher in a resist composition, enabling to form a pattern of good profile with minimal LWR, rectangularity, and high resolution.