The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Jun. 05, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Stephanie Allard, Quebec, CA;

Martin Beaumier, Quebec, CA;

Jean-Francois Drapeau, Quebec, CA;

Jean Labonte, Quebec, CA;

Steven P. Ostrander, Poughkeepsie, NY (US);

Sylvain Ouimet, St-Hubert, CA;

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 7/00 (2006.01); H01L 21/687 (2006.01); H01L 23/00 (2006.01); H05K 3/00 (2006.01); H01L 23/367 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); H01L 23/3675 (2013.01); H05K 3/00 (2013.01); H01L 24/32 (2013.01); H01L 24/83 (2013.01); H01L 2224/2929 (2013.01); H01L 2224/29387 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/753 (2013.01); H01L 2224/7531 (2013.01); H01L 2224/75301 (2013.01); H01L 2224/75314 (2013.01); H01L 2224/8385 (2013.01); Y10T 29/49826 (2015.01); Y10T 29/49998 (2015.01);
Abstract

A clamping apparatus and method for applying a force to a workpiece during processing includes a base defining a work area. The work area is configured to receive a joined structure including a substrate and a die. A component is positionable in the work area and over the joined structure. An adjustable releasable structure is positionable over the component and the joined structure and includes a resilient mechanism having an inner member for contacting the component to apply an inner downward force to the component. The resilient mechanism also includes outer members for applying an outer downward force to opposing distal edge areas of the substrate. An external downward force is applied to the adjustable releasable structure, such that the inner and outer members apply the inner and outer downward forces to the component and the opposing distal edge areas of the substrate, respectively, during processing of the joined structure.


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